Intel still puts EUV on its roadmap, has a backup litho plan

02/13/2012 |

Intel remains committed to using extreme-ultraviolet lithography when the time comes to make chips with 10-nanometer dimensions, with plans to install an EUV pilot line by the end of this year. Still, the chipmaker may turn to immersion lithography with multi-patterning schemes for 10nm devices if EUV doesn't work out, said Sam Sivakumar, director of lithography in the company's Portland Technology Development Group.

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